Traveling range on table : 200mm for Z axis, 200mm for Y axis, θ±5° for axis
Traveling range on microscopre's table : 25mm for X axis, 25mm for Y axis
Traveeling range of Z axis : 5mm（attached up & down stift lever, 3mm/300um in regulated amunt）
Chuck size : 8 inches（φ200mm）
Wafer oolding method : vacuumed
External dimension : approx. W600×D550×H700mm
Weight : approx. 80㎏
Constitution : main body of prober amd metallurgical microscope S70Z（Mitsutoyo's) attached objective lenses for 5X,10X,20X,50X, eye lens fof 10X, shiled box with vibration removal board (external dimension：approx. W900×D800×H1540mm( for wen door open, H approx. 2000㎜, weight：approx 220kg), 2 of positioners (Micronics Japan's M202C), 1 of lighting device for microscope (SCOTT's MEGALIGHT 100）
Required facilities : vacuum pump for chuck, compressor to make 0.25MPa for vibration removal board, power supply of AC100V for lighting device for microscope
NOTE : compressor, vucuum pump and manual not attached