Reaction chamber : W350×D260×H100mm wiewing port(φ20mm) installed in front of the chamber
Transefer method : without the method, works are installed by prerators
Erectrode construction : RIE, ground electrode (anode electrode) for upper electrode, powered electrode (cathode electrode) for lower electrode
High frequency power source : 13.56MHz in quartz oscillator ,solid state type MAX 1KW in NAH-1013-1AP(a JRC)
Matching method : full- automatic in NFC-130-1P(a JRC)
Exhaust system : 1670L/min in EV-S20A(an EBARA)
Control system : sequence controller(an OMURON)
Operation : touch panel
Compressed air as utility : 0.5～0.7Mpa in purge gas, N2 0.2MPa 30L/min as flow rate, O2 0.1Mpa Ar 0.1MPa as process gas, 0.1～0.2MPa 30L/min as flow rate for cooling water(chamber), 1.5～3,0L/min as fow rate for cooling water (vaccum pump)
Power supply : 3φ AC200V 60Hz 5KVA
External dimension : approx. W1380×D820×H2050mm, included signal tower
Control panel : approx. W800×D400×H700mm