MRC 903M

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MRC 903M SPUTTERING SYSTEM
3 CATHODES

LOAD LOCK

(PALLET IS APPROXIMATELY 12X12″ FOR ANY SIZE PARTS)

WHOLE PALLET IS COATED, NO HOLDING FIXTURES NEEDED

NEW PROGRAMMABLE HMI/PLC SYSTEM

(MENU DRIVEN WITH OPERATOR AND PROCESS ENGINEER MODES)

NEW RF ETCH POWER SUPPLY WITH NEW MATCHING NETWORK

REBUILT CTI 8 CRYOPUMP WITH COMPRESSOR AND LINES
REBUILT DUAL STAGE MECHANICAL PUMP

(COVERED BY 1 YEAR WARRANTY)

NEW ELECTRONICS COVERED BY 1 YEAR WARRANTY

PROGRAMMABLE FEATURES INCLUDED:

AUTOMATIC LOAD AND UNLOAD OF PARTS INTO CHAMBER

POWER AND TIME SETTINGS FOR SPUTTER P/S  FOR PROGRAM ON TOUCH SCREEN

POWER AND TIME SETTINGS FOR ETCH  P/S  FOR PROGRAM ON TOUCH SCREEN

MFC, CONTROL OF VACUUM LEVEL  FOR PROGRAM ON TOUCH SCREEN

MENU TO SELECT NUMBER OF SCANS ON EACH TARGET AND ETCH PLATFORM (SELECTABLE SEQUENCE)

MENU TO REST PARTS ON ETCH PLATFORM (TO COOL BETWEEN TARGET SCANS)

SELECTION OF 10 RECIPE/PROGRAMS WITH ALL SETTINGS ABOVE  ON TOUCH SCREEN

(REQUIRES 25% DEPOSIT, ALLOW 3 MONTHS FOR DEMONSTRATION, BALANCE PRIOR TO SHIPPING)