Temescal FC-2000

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Temescal Ferrotec FC-2000 Ebeam Evaporator with Ion Gun Etch. The FC-2000 is a fast- cycle, load-locked system that allows the source to remain under vacuum during substrate reloading. The system is configured with a 6 pocket electron gun with a supersweep 64 sweep controller and the CV-6SLX 6KW E-gun power supply. The system also has a single resistive thermal deposition source. There is a 3-cm Ion source for etch or assisted deposition. Also includes the Inficon XTC/3S crystal deposition controller with dual crystal holder. System has a lift off dome for 4" wafers and variable speed substrate rotation.Standard source-to-substrate distance: 19.5Prime;. The bell jar is 20" diameter. The Temescal Control System (TCS) provides fully integrated, recipe-driven process and vacuum control. Operating in any of three password-protected modes, the TCS also offers process variable monitoring, process and historical trend tracking, and process data logging. The TCS Automatic Mode. Auto mode operation provides fully automated execution of user-programmed recipes consisting of up to twenty process steps, as well as full abort diagnostics. The TCS Auto Mode also offers independent autopump and autovent operations, automated cryopump regeneration, and automated rate-of-rise testing. Manual Mode Operation. The TCS manual mode enables the user to set process parameters, operate major components and subsystems individually with full interlock protection, and execute nonautomated single-film deposition processes. Service Mode Operation. The TCS service mode provides noninterlocked low-level control over any of the systemrsquo;s valves, pumps, motors, or power supplies. System Power 208V, 3Ph, 60Hz
InvNumber: 64981