Categories: Semi & SMT/PCB, Etchers
Manufacturer: ASM
Condition: Used
Seller: Bid Service, LLC
Dual SLR ICP Plasmatherm SLR ICP Shuttle Lock ICP Inductively Coupled Plasma Etch...
Plasmatherm SLR ICP Shuttle Lock ICP Inductively Coupled Plasma Etch System. PC controller. Vacuum load lock with wafer transfer robot. Can process wafers from 2rdquo; to 8rdquo; depending on which process kit is installed. Currently configured with 4rdquo; kit.nbsp; High frequency RF-based inductively coupled plasma source capable of high density plasma generation. Closed loop pressure control. Turbo pump with roughing pump. Total of eight MFC gas controllers. Includes water chiller and roughing pump. 208V, 3Ph, 60HzInvNumber: 64813
Used-Line Dealer since : 1999
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Product Specs
(From Used-Line T&M Specifications)
ASM Dual SLR ICP
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