Semiconductor Analyser (with B1517A x4)
The Keysight B1500A (Agilent) Semiconductor Device Analyzer is a modular instrument with a ten-slot configuration that supports both IV and CV measurements and also fast high-voltage pulsing. Its familiar, Microsoft ® Windows ® user interface supports Agilent’s EasyEXPERT software, which provides a new, more intuitive task-oriented approach to device characterization. Because of its extremely low-current, low-voltage, and integrated capacitance measurement capabilities, the Keysight B1500A (Agilent) can be used for a wide range of semiconductor device characterization needs (IC-CAP supports the B1500A). It is also an excellent solution for non-volatile memory cell characterization and high-speed device characterization (including advanced NBTI measurement).
Features and benefits of the Keysight B1500A (Agilent) include:
Superior IV measurement performance: 0.1 fA / 0.5 µV measurement resolution
Measurement features include single and multi-channel sweep, time sampling, list sweep, quasi-static CV (using the SMUs), direct control and arbitrary linear waveform generation (ALWG) GUI for the HV-SPGUs.
Optional, integrated capacitance module supports CV measurements up to 5 MHz
Optional positioner-based CV-IV switching solutions available with 0.5 µV voltage measurement resolution and 10 fA, 1 fA or 0.1 fA current measurement resolution capability
Easy test automation with built-in semiautomatic wafer prober drivers and test sequencing without programming via the Quick Test mode
Optional high-voltage semiconductor pulse generator unit (HV-SPGU) available with 10 ns programmable pulse widths and +/- 40 V (80 V peak-to-peak) output.
Optional waveform generator/fast measurement unit (WGFMU) available with ALWG and fast current or voltage measurement capabilities.
10 ns pulsed IV solution is available for characterizing high-k gate dielectric and SOI (silicon-on-insulator) transistors.
A Classic Test mode is available to provide the look, feel, and terminology of the 4155/4156 interface while enhancing user interaction by taking full advantage of Microsoft ® Windows ® GUI features
Key specifications of the Keysight B1500A (Agilent) Semiconductor Device Analyzer include:
General Features
PC-based instrument with Windows ® XP Professional OS
Single-box solution for current-voltage (IV), capacitance-voltage (CV), pulse generation, fast IV, and time-domain measurement.
Ten module slots for source monitor units (SMUs) and other module types (MFCMU, HV-SPGU and WGFMU) *
Offline data analysis and application test development via Desktop EasyEXPERT software
Measurement Capabilities
Supports current-voltage (IV) measurement to 0.1fA and 0.5µV
Supports both quasi-static and medium-frequency capacitance-voltage (CV) measurement ]
Supports accurate fast IV and time-domain measurement for a wide range of applications such as pulsed IV, NBTI and RTS measurement.
Supports high voltage pulse generation (up to ±40 V) for high power and memory device testing.
Module Selection Guide:
| Module Main | Slots | Specification |
| B1510A HPSMU | 2 | Up to 200V, 1A force. 10fA current resolution |
| B1511A MPSMU | 1 | Up to 100V, 100mA force, 10fA current resolution |
| B1517A HRSMU | 1 | Up to 100V, 100mA force, 1fA current resolution |
| E5288A ASU | NA | Up to 100V, 100mA force, 100aA current resolutio |
| B1520A MFCMU | 1 | 1kHz to 5MHz, up to 100V DC bias with SMU |
| B1525A HV-SPGU | 1 | Min 12.5ns pulse width, 10ns transition time, up to 40V with 3 level pu |
| B1530A WGFMU | 1 | Min 100ns pulse width, 10V peak-to-peak output, 5ns current or voltage measurement sampling speed |