Categories: Semi & SMT/PCB, Etchers
Manufacturer: ASM
Condition: Used
Seller: Bid Service, LLC
SLR 720/720 Plasmatherm SLR-720/720 Dual Chamber RIE Reactive Ion Etch System. PC...
Plasmatherm SLR-720/720 Dual Chamber RIE Reactive Ion Etch System. PC controller with graphical user interface. Dual chamber unit with robot loader. Was lasted used to process 4" wafers. RF5S 500W, 13.56 MHz RF Generator. Comes with a Turbo pump but does not come with roughing pump. Currently confi gured with nine MFC. 208V, 3 Ph, 60 Hz. Sold as is where is untested at this price.InvNumber: 64538
Used-Line Dealer since : 1999
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Product Specs
(From Used-Line T&M Specifications)
ASM SLR 720/720
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